US 11,747,608 B2
MEMS optical device comprising a lens and an actuator for controlling the curvature of the lens, and related manufacturing process
Enri Duqi, Milan (IT); Dario Paci, Vittuone (IT); Lorenzo Baldo, Bareggio (IT); and Domenico Giusti, Caponago (IT)
Filed by STMICROELECTRONICS S.R.L., Agrate Brianza (IT)
Filed on Apr. 13, 2020, as Appl. No. 16/847,514.
Claims priority of application No. 102019000005802 (IT), filed on Apr. 15, 2019.
Prior Publication US 2020/0326530 A1, Oct. 15, 2020
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); H01L 27/146 (2006.01)
CPC G02B 26/08 (2013.01) [B81B 3/0018 (2013.01); H01L 27/14627 (2013.01); B81B 2201/047 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A MEMS optical device, comprising:
a semiconductor body;
a main cavity which extends within the semiconductor body;
a membrane suspended over the main cavity;
a piezoelectric actuator which is mechanically coupled to the membrane and is electronically controllable to deform the membrane, the piezoelectric actuator includes a surface that faces away from the semiconductor body and the main cavity;
a micro-lens mechanically coupled to the membrane and configured to undergo deformation in response to a deformation of the membrane, the micro-lens includes a first portion that is recessed within the piezoelectric actuator and a second portion that protrudes outward from the surface of the piezoelectric actuator, and the first portion is laterally enveloped by the piezoelectric actuator; and
a rigid optical element which contacts the micro-lens and is arranged so that the micro-lens is interposed between the rigid optical element and the membrane, wherein the micro-lens and the main cavity are arranged on opposite sides of the membrane.