US 11,747,604 B2
Method and device for scanning a sample
Lars Friedrich, Mannheim (DE); and Holger Birk, Meckesheim (DE)
Assigned to LEICA MICROSYSTEMS CMS GMBH, Wetzlar (DE)
Appl. No. 16/760,486
Filed by LEICA MICROSYSTEMS CMS GMBH, Wetzlar (DE)
PCT Filed Nov. 5, 2018, PCT No. PCT/EP2018/080208
§ 371(c)(1), (2) Date Apr. 30, 2020,
PCT Pub. No. WO2019/086680, PCT Pub. Date May 9, 2019.
Claims priority of application No. 10 2017 125 688.1 (DE), filed on Nov. 3, 2017.
Prior Publication US 2020/0355898 A1, Nov. 12, 2020
Int. Cl. G02B 21/00 (2006.01); G02B 21/06 (2006.01)
CPC G02B 21/0036 (2013.01) [G02B 21/0032 (2013.01)] 20 Claims
OG exemplary drawing
 
16. A device for scanning a sample, the device comprising:
an illumination unit configured to generate at least two illumination points in order to form a point pattern;
a deflection element; and
a control unit configured to control the illumination unit based on a set or preset value of at least one parameter for defining the point pattern,
wherein the point pattern is movable using the deflection element, in order to scan at least one predefined region of the sample, along a first direction such that a first set of scan lines assigned to the at least two illumination points of the point pattern are generated, and along a second direction, and then again along the first direction, such that a second set of scan lines are generated,
wherein a distance defined in scan lines between the at least two illumination points of the point pattern is at least one scan line,
wherein the movement of the point pattern in the second direction is carried out in scan steps of identical size or at a constant speed, and
wherein a length of the predefined region along the second direction is greater than a length of the point pattern along the second direction by at least a factor of two.