US 11,747,561 B2
Sliced grating coupler with increased beam alignment sensitivity
Gerard Schmid, Guilford, CT (US); Kyle Preston, Guilford, CT (US); and Shannon Stewman, Guilford, CT (US)
Assigned to Quantum-Si Incorporated, Branford, CT (US)
Filed by Quantum-Si Incorporated, Guilford, CT (US)
Filed on Apr. 29, 2020, as Appl. No. 16/861,399.
Claims priority of provisional application 62/861,832, filed on Jun. 14, 2019.
Prior Publication US 2020/0393616 A1, Dec. 17, 2020
Int. Cl. G02B 6/124 (2006.01); G01N 21/64 (2006.01); G02B 6/12 (2006.01)
CPC G02B 6/124 (2013.01) [G01N 21/6428 (2013.01); G02B 6/12004 (2013.01); G01N 2021/6439 (2013.01); G02B 2006/12107 (2013.01)] 18 Claims
OG exemplary drawing
 
15. An integrated device comprising:
a grating disposed on a substrate and arranged to couple radiation incident on the grating into a plurality of optical waveguides disposed on the substrate;
a first inlet to a first receiving region of the plurality of optical waveguides; and
a second inlet to a second receiving region of the plurality of optical waveguides, wherein the second inlet is offset a first amount with respect to the first inlet in a first direction approximately perpendicular to lines of the grating; and
a plurality of pixels formed on the substrate, each including a reaction chamber and an optical sensor, wherein at least one waveguide is configured to provide excitation radiation to a plurality of the reaction chambers;
wherein each reaction chamber is configured to receive a sample for genetic sequencing or protein sequencing, detection and/or measurement.