US 11,747,365 B2
Probe substrate and electrical connecting apparatus
Toshinori Omori, Tokyo (JP); Kazuya Goto, Tokyo (JP); Yasuaki Osanai, Tokyo (JP); Takashi Akiniwa, Tokyo (JP); Takeki Sugisawa, Tokyo (JP); Takeshi Kondo, Kanagawa (JP); Shintaro Abe, The Cavendish (SG); and Maki Watanabe, Kanagawa (JP)
Assigned to KABUSHIKI KAISHA NIHON MICRONICS, Tokyo (JP); and TANAKA KIKINZOKU KOGYO K.K., Tokyo (JP)
Appl. No. 17/417,183
Filed by KABUSHIKI KAISHA NIHON MICRONICS, Tokyo (JP); and TANAKA KIKINZOKU KOGYO K.K., Tokyo (JP)
PCT Filed Oct. 18, 2019, PCT No. PCT/JP2019/041156
§ 371(c)(1), (2) Date Dec. 9, 2021,
PCT Pub. No. WO2020/148960, PCT Pub. Date Jul. 23, 2020.
Claims priority of application No. 2019-004573 (JP), filed on Jan. 15, 2019.
Prior Publication US 2022/0099702 A1, Mar. 31, 2022
Int. Cl. G01R 1/04 (2006.01); G01R 1/067 (2006.01); G01R 1/073 (2006.01); G01R 31/28 (2006.01); G01R 3/00 (2006.01); H01L 21/48 (2006.01); H01L 21/66 (2006.01)
CPC G01R 1/07342 (2013.01) [G01R 3/00 (2013.01); G01R 31/2889 (2013.01); H01L 22/12 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A probe substrate comprising:
a plurality of electrical contactors respectively brought into electrical contact with a plurality of electrode terminals of a member to be inspected,
wherein a joint portion for a member to be joined is provided on one or each of a first surface and a second surface of the probe substrate and the member to be joined is joined to the joint portion with a metal layer that includes, in a metal component, at least 70 atomic percent or more of a transition metal and that is formed by sintering, and/or in a joining surface between a plurality of substrates of the probe substrate, the substrates are joined together with the metal layer formed by sintering,
in the metal layer formed by sintering, a plurality of organic component parts and/or voids formed by heating an adhesive composition including a thermoplastic resin are left and
a plurality of the organic component parts and/or the voids included in the metal layer formed by sintering have 5 to 80 area percent in a vertical cross section of the metal layer formed by sintering.