CPC G01R 1/07342 (2013.01) [G01R 3/00 (2013.01); G01R 31/2889 (2013.01); H01L 22/12 (2013.01)] | 19 Claims |
1. A probe substrate comprising:
a plurality of electrical contactors respectively brought into electrical contact with a plurality of electrode terminals of a member to be inspected,
wherein a joint portion for a member to be joined is provided on one or each of a first surface and a second surface of the probe substrate and the member to be joined is joined to the joint portion with a metal layer that includes, in a metal component, at least 70 atomic percent or more of a transition metal and that is formed by sintering, and/or in a joining surface between a plurality of substrates of the probe substrate, the substrates are joined together with the metal layer formed by sintering,
in the metal layer formed by sintering, a plurality of organic component parts and/or voids formed by heating an adhesive composition including a thermoplastic resin are left and
a plurality of the organic component parts and/or the voids included in the metal layer formed by sintering have 5 to 80 area percent in a vertical cross section of the metal layer formed by sintering.
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