US 11,747,358 B2
Angular velocity sensor, electronic apparatus, and vehicle
Kazuyuki Nagata, Minowa (JP); and Takayuki Kikuchi, Chino (JP)
Assigned to SEIKO EPSON CORPORATION
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on May 12, 2022, as Appl. No. 17/742,788.
Application 17/742,788 is a continuation of application No. 16/285,793, filed on Feb. 26, 2019, granted, now 11,378,584.
Claims priority of application No. 2018-032897 (JP), filed on Feb. 27, 2018.
Prior Publication US 2022/0268802 A1, Aug. 25, 2022
Int. Cl. G01P 3/44 (2006.01); G01C 19/5649 (2012.01)
CPC G01P 3/44 (2013.01) [G01C 19/5649 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An angular velocity sensor comprising:
three mutually orthogonal axes being defined as an X-axis, a Y-axis, and a Z-axis;
a substrate; and
an element section that is supported on the surface of the substrate orthogonal to the Z axis and detects an angular velocity based on a change in capacitance between a movable electrode and a stationary electrode, wherein
the element section further comprises:
a first electrode including a first trunk part extending in a Y-axis direction along the Y-axis, and a plurality of first electrode fingers extending in an X-axis direction along the X-axis from an edge portion of the positive side of the X-axis of the first trunk part; and
a spring extending in the Y-axis direction, wherein
the first trunk part includes a first surface adjacent to the spring at an edge portion of the negative side of the X axis; and
in a plan view from a Z-axis direction along the Z-axis, a distance between one end side of the first surface and the spring is different from a distance between an other end side of the first surface and the spring.