US 11,747,303 B2
Magnetic sensor and inspection device
Hitoshi Iwasaki, Tokyo (JP); Satoshi Shirotori, Kanagawa (JP); Akira Kikitsu, Kanagawa (JP); and Yoshihiro Higashi, Ishikawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Aug. 5, 2021, as Appl. No. 17/395,183.
Claims priority of application No. 2020-206822 (JP), filed on Dec. 14, 2020.
Prior Publication US 2022/0187247 A1, Jun. 16, 2022
Int. Cl. G01N 27/90 (2021.01); G01N 33/2045 (2019.01)
CPC G01N 27/9006 (2013.01) [G01N 33/2045 (2019.01)] 20 Claims
OG exemplary drawing
 
1. A magnetic sensor, comprising: a first sensor part,
the first sensor part including,
a first magnetic member;
a first counter magnetic member, a direction from the first magnetic member to the first counter magnetic member being along a first direction; and
a first magnetic element including one or a plurality of first extending portions,
a first portion of the first extending portion overlapping the first magnetic member in a second direction crossing the first direction,
a first counter portion of the first extending portion overlapping the first counter magnetic member in the second direction,
a first direction length along the first direction of the first extending portion being longer than a third direction length along a third direction of the first extending portion, the third direction crossing a plane including the first direction and the second direction,
wherein
the first sensor part includes a first conductive member,
at least a part of the first conductive member overlaps a region between the first magnetic member and the first counter magnetic member in the second direction,
a first current including alternating current component is configured to flow through the first conductive member, and
the first current is along the third direction.