US 11,747,288 B2
Non-destructive inspection system comprising neutron radiation source and neutron radiation method
Shigenori Nagano, Saitama (JP); Hisashi Tsukada, Hachiouji (JP); Yoshie Otake, Wako (JP); Koji Ikado, Wako (JP); Yuichi Yoshimura, Wako (JP); and Hideyuki Sunaga, Wako (JP)
Assigned to Topcon Corporation, Tokyo (JP); and RIKEN, Saitama (JP)
Appl. No. 17/279,537
Filed by Topcon Corporation, Tokyo (JP); and RIKEN, Saitama (JP)
PCT Filed Sep. 25, 2019, PCT No. PCT/JP2019/037500
§ 371(c)(1), (2) Date Mar. 24, 2021,
PCT Pub. No. WO2020/067114, PCT Pub. Date Apr. 2, 2020.
Claims priority of application No. 2018-182813 (JP), filed on Sep. 27, 2018.
Prior Publication US 2021/0396688 A1, Dec. 23, 2021
Int. Cl. G01N 23/05 (2006.01); G01N 23/09 (2018.01); G01N 23/204 (2006.01); G01V 5/00 (2006.01); G01N 23/20008 (2018.01); H05H 3/04 (2006.01); H05H 6/00 (2006.01); H05H 7/04 (2006.01); H05H 9/00 (2006.01); G01N 23/02 (2006.01)
CPC G01N 23/204 (2013.01) [G01N 23/025 (2013.01); G01N 23/05 (2013.01); G01N 23/09 (2013.01); G01N 23/20008 (2013.01); G01V 5/0025 (2013.01); G01V 5/0066 (2013.01); H05H 3/04 (2013.01); H05H 6/00 (2013.01); H05H 7/04 (2013.01); H05H 9/00 (2013.01); G01N 2223/04 (2013.01); G01N 2223/045 (2013.01); G01N 2223/053 (2013.01); G01N 2223/106 (2013.01); G01N 2223/20 (2013.01); G01N 2223/204 (2013.01); G01N 2223/33 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A non-destructive inspection system comprising:
a neutron radiation source capable of emitting neutrons; and
a neutron detector capable of detecting neutrons back-scattered inside an inspection object among neutrons emitted from the neutron radiation source,
the neutron radiation source including:
a linear accelerator capable of emitting accelerated charged particles;
a first magnet section including magnets facing each other, the magnets being capable of deflecting the accelerated charged particles in a direction substantially perpendicular to a direction of emission of the accelerated charged particles emitted from the linear accelerator; and
a target section capable of producing neutrons by being irradiated with the accelerated charged particles that have passed through the first magnet section.