US 11,747,229 B2
Frequency-modulating sensor array
Paul M. Hagelin, Saratoga, CA (US); Charles I. Grosjean, Los Gatos, CA (US); and Lev Goncharov, St. Petersburg (RU)
Assigned to SiTime Corporation, Santa Clara, CA (US)
Filed by SiTime Corporation, Santa Clara, CA (US)
Filed on Dec. 13, 2022, as Appl. No. 18/80,243.
Application 17/712,095 is a division of application No. 15/702,717, filed on Sep. 12, 2017, granted, now 11,320,329, issued on May 3, 2022.
Application 18/080,243 is a continuation of application No. 17/712,095, filed on Apr. 2, 2022, granted, now 11,609,136.
Claims priority of provisional application 62/438,987, filed on Dec. 23, 2016.
Claims priority of provisional application 62/393,640, filed on Sep. 12, 2016.
Prior Publication US 2023/0184609 A1, Jun. 15, 2023
Int. Cl. G01L 5/16 (2020.01); G01L 1/14 (2006.01); G01L 1/20 (2006.01); G01L 9/00 (2006.01)
CPC G01L 5/16 (2013.01) [G01L 1/146 (2013.01); G01L 1/205 (2013.01); G01L 9/001 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device comprising:
a material having first and second regions;
microelectromechanical systems (MEMS) resonators respective to the first and second regions, each of the MEMS resonators having a respective frequency of resonant vibration that is to vary dependent on influence of a physical environmental property experienced at the respective region; and
circuitry to produce a signal identifying a specific one of the first and second regions as a function of relative variation in the respective frequencies of resonant vibration.