CPC G01L 5/16 (2013.01) [G01L 1/146 (2013.01); G01L 1/205 (2013.01); G01L 9/001 (2013.01)] | 20 Claims |
1. A device comprising:
a material having first and second regions;
microelectromechanical systems (MEMS) resonators respective to the first and second regions, each of the MEMS resonators having a respective frequency of resonant vibration that is to vary dependent on influence of a physical environmental property experienced at the respective region; and
circuitry to produce a signal identifying a specific one of the first and second regions as a function of relative variation in the respective frequencies of resonant vibration.
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