US 11,746,788 B2
Vacuum pump having a liquid cooled vibration monitoring device mounted thereon
Shuichi Iguchi, Ina (JP)
Assigned to SEIKO EPSON CORPORATION
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on Aug. 24, 2021, as Appl. No. 17/409,880.
Claims priority of application No. 2020-141531 (JP), filed on Aug. 25, 2020; and application No. 2021-099986 (JP), filed on Jun. 16, 2021.
Prior Publication US 2022/0065253 A1, Mar. 3, 2022
Int. Cl. F04C 29/04 (2006.01); F04C 28/28 (2006.01); F04C 18/16 (2006.01)
CPC F04C 29/04 (2013.01) [F04C 28/28 (2013.01); F04C 18/16 (2013.01); F04C 2220/10 (2013.01); F04C 2240/30 (2013.01); F04C 2240/81 (2013.01); F04C 2270/12 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A device comprising:
a movable body;
a housing configured to house the movable body; and
a monitoring device attached to the housing and configured to detect vibration of the housing, wherein
the housing includes first channels for causing a coolant to flow to overlap the monitoring device in a plan view from a direction perpendicular to an attachment surface for the monitoring device,
the housing includes second channels for causing the coolant to flow to a portion opposed to the moveable body,
the device further comprises a dividing section configured to divide a supply channel for supplying the coolant into the first channels and the second channels, and
the first channels have higher density than the second channels.
 
5. A device comprising:
a movable body;
a housing configured to house the movable body; and
a monitoring device attached to the housing and configured to detect vibration of the housing, wherein
the housing includes first channels for causing a coolant to flow to overlap the monitoring device in a plan view from a direction perpendicular to an attachment surface for the monitoring device, and
a length of a sectional shape of the first channels in a direction parallel to the attachment surface for the monitoring device is larger than a length in the direction perpendicular to the attachment surface for the monitoring device.