CPC F04C 29/04 (2013.01) [F04C 28/28 (2013.01); F04C 18/16 (2013.01); F04C 2220/10 (2013.01); F04C 2240/30 (2013.01); F04C 2240/81 (2013.01); F04C 2270/12 (2013.01)] | 5 Claims |
1. A device comprising:
a movable body;
a housing configured to house the movable body; and
a monitoring device attached to the housing and configured to detect vibration of the housing, wherein
the housing includes first channels for causing a coolant to flow to overlap the monitoring device in a plan view from a direction perpendicular to an attachment surface for the monitoring device,
the housing includes second channels for causing the coolant to flow to a portion opposed to the moveable body,
the device further comprises a dividing section configured to divide a supply channel for supplying the coolant into the first channels and the second channels, and
the first channels have higher density than the second channels.
|
5. A device comprising:
a movable body;
a housing configured to house the movable body; and
a monitoring device attached to the housing and configured to detect vibration of the housing, wherein
the housing includes first channels for causing a coolant to flow to overlap the monitoring device in a plan view from a direction perpendicular to an attachment surface for the monitoring device, and
a length of a sectional shape of the first channels in a direction parallel to the attachment surface for the monitoring device is larger than a length in the direction perpendicular to the attachment surface for the monitoring device.
|