	US 11,746,437 B2
	Nanocomposite-seeded epitaxial growth of single-domain lithium niobate thin films for surface acoustic wave devices
Haiyan Wang, West Lafayette, IN (US); Robynn-Lynne Paldi, Albuquerque, NM (US); and Aleem Siddiqui, Albuquerque, NM (US)
Assigned to Purdue Research Foundation, West Lafayette, IN (US)
Filed by Purdue Research Foundation, West Lafayette, IN (US)
Filed on Dec. 20, 2021, as Appl. No. 17/555,660.
Claims priority of provisional application 63/152,712, filed on Feb. 23, 2021.
Prior Publication US 2022/0364265 A1, Nov. 17, 2022
Int. Cl. C30B 23/02 (2006.01); C30B 29/30 (2006.01); C30B 25/18 (2006.01); C30B 25/06 (2006.01)

CPC C30B 29/30 (2013.01) [C30B 25/06 (2013.01); C30B 25/18 (2013.01)]

3 Claims

1. A method for making LNO film, comprising:

a) identifying a substrate;

b) identifying a deposition target;

c) placing the substrate and deposition target in a deposition environment;

d) evolving target material into the deposition environment;

e) depositing evolved target material onto the substrate to yield an LNO film;

wherein the deposition environment defines a temperature of between 500 degrees Celsius and 750 degrees Celsius and a pressure of 10⁻⁶Torr;

f) before c), establishing a seed layer on the substrate;

wherein the seed layer is between 10 nm and 50 nm thick; and

wherein the seed layer is 30 mole percent gold and 70 mole percent LiNbO₃.