CPC C23C 16/4487 (2013.01) [C23C 16/45512 (2013.01); C23C 16/45523 (2013.01); C23C 16/45525 (2013.01); C23C 16/45561 (2013.01); C23C 16/52 (2013.01)] | 18 Claims |
1. A method of operating a chemical delivery system comprising at least one bulk container, at least one run/refill chamber, and at least one deposition chamber, the method comprising: storing a precursor in at least one of the bulk containers; transporting the precursor in vapor form from the bulk container to a first run/refill chamber; receiving the precursor in vapor form in the first run/refill chamber; condensing and storing the precursor in solid form in the first run/refill chamber; causing sublimation of the solid precursor within the first run/refill chamber; and transporting the sublimed precursor in vapor form from the first run/refill chamber to a first deposition chamber, wherein at least one of the run/refill chambers includes a plurality of spaced tubes having a plurality of surfaces configured to receive the precursor in vapor form and store the precursor in solid form.
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