US 11,746,413 B2
Chemical delivery system and method of operating the chemical delivery system
David James Eldridge, Liberty Hill, TX (US); David Peters, Kingsland, TX (US); Robert Wright, Jr., Newtown, CT (US); Bryan C. Hendrix, Danbury, CT (US); Scott L. Battle, Cedar Park, TX (US); and John Gregg, Marble Falls, TX (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on May 31, 2022, as Appl. No. 17/829,007.
Application 17/829,007 is a division of application No. 16/210,244, filed on Dec. 5, 2018, granted, now 11,421,320.
Claims priority of provisional application 62/595,740, filed on Dec. 7, 2017.
Prior Publication US 2022/0298629 A1, Sep. 22, 2022
Int. Cl. C23C 16/40 (2006.01); C23C 16/448 (2006.01); C23C 16/52 (2006.01); C23C 16/455 (2006.01)
CPC C23C 16/4487 (2013.01) [C23C 16/45512 (2013.01); C23C 16/45523 (2013.01); C23C 16/45525 (2013.01); C23C 16/45561 (2013.01); C23C 16/52 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method of operating a chemical delivery system comprising at least one bulk container, at least one run/refill chamber, and at least one deposition chamber, the method comprising: storing a precursor in at least one of the bulk containers; transporting the precursor in vapor form from the bulk container to a first run/refill chamber; receiving the precursor in vapor form in the first run/refill chamber; condensing and storing the precursor in solid form in the first run/refill chamber; causing sublimation of the solid precursor within the first run/refill chamber; and transporting the sublimed precursor in vapor form from the first run/refill chamber to a first deposition chamber, wherein at least one of the run/refill chambers includes a plurality of spaced tubes having a plurality of surfaces configured to receive the precursor in vapor form and store the precursor in solid form.