US 11,746,410 B2
Heat treatment apparatus heating substrate
Yasuaki Kondo, Kyoto (JP); and Mao Omori, Kyoto (JP)
Assigned to SCREEN Holdings Co., Ltd., Kyoto (JP)
Filed by SCREEN Holdings Co., Ltd., Kyoto (JP)
Filed on Nov. 2, 2021, as Appl. No. 17/516,750.
Claims priority of application No. 2020-202772 (JP), filed on Dec. 7, 2020.
Prior Publication US 2022/0178015 A1, Jun. 9, 2022
Int. Cl. C23C 14/54 (2006.01); C23C 14/50 (2006.01); C23C 14/24 (2006.01)
CPC C23C 14/541 (2013.01) [C23C 14/24 (2013.01); C23C 14/50 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A heat treatment apparatus for heating a substrate, comprising:
a chamber housing a substrate;
a heating part performing a heat treatment on the substrate housed in the chamber;
a combustion-supporting gas line supplying combustion-supporting gas to the chamber;
a flammable gas line supplying flammable gas to the chamber; and
an inert gas line sending inert gas to the combustion-supporting gas line to replace gas in the combustion-supporting gas line with the inert gas and sending inert gas to the flammable gas line to replace gas in the flammable gas line with the inert gas, wherein the inert gas line is provided in the combustion-gas line and the flammable gas line in common, wherein
a first mass flow controller is provided in the combustion-supporting gas line,
a second mass flow controller and a mass flow meter are provided in the flammable gas line,
a third mass flow controller is provided in the inert gas line, and
a plurality of apparatuses including the first mass flow controller provided in the combustion-supporting gas line is integrated as a combustion-supporting gas supply unit,
a plurality of apparatuses including the second mass flow controller and the mass flow meter provided in the flammable gas line is integrated as a flammable gas supply unit, and
a plurality of apparatuses including the third mass flow controller provided in the inert gas line is integrated as an inert gas supply unit, and
at least the second mass flow controller and the mass flow meter are housed in an enclosure, and
nitrogen is supplied into the enclosure.