US 11,746,407 B2
Method for manufacturing deposition mask, method for manufacturing display device and deposition mask
Shunsuke Sato, Tokyo (JP); Reiji Terada, Tokyo (JP); and Naoko Mikami, Tokyo (JP)
Assigned to TOPPAN PRINTING CO., LTD., Tokyo (JP)
Filed by TOPPAN PRINTING CO., LTD., Tokyo (JP)
Filed on Oct. 25, 2021, as Appl. No. 17/510,345.
Application 17/510,345 is a continuation of application No. 16/816,181, filed on Mar. 11, 2020, granted, now 11,180,843.
Application 16/816,181 is a continuation of application No. PCT/JP2018/034083, filed on Sep. 13, 2018.
Claims priority of application No. 2017-178223 (JP), filed on Sep. 15, 2017.
Prior Publication US 2022/0042160 A1, Feb. 10, 2022
Int. Cl. H01L 51/00 (2006.01); C23C 14/04 (2006.01); C23C 14/58 (2006.01); H10K 71/16 (2023.01)
CPC C23C 14/042 (2013.01) [C23C 14/588 (2013.01); C23C 14/5813 (2013.01); H10K 71/166 (2023.02)] 4 Claims
OG exemplary drawing
 
1. A vapor deposition mask comprising:
a sheet-shaped mask portion made of an iron-nickel alloy and having a contact surface, which is configured to be in contact with a vapor deposition target, and a non-contact surface, which is opposite to the contact surface, wherein the mask portion includes a plurality of mask holes each extending from a first opening, which is located in the non-contact surface, to a second opening, which is located in the contact surface, and the second opening is smaller in size than the first opening; and
a mask frame that has a welding mark welded to the non-contact surface, has a higher rigidity than the mask portion, and is in a shape of a frame surrounding the mask holes,
the mask portion is formed by peeling off a plastic layer and a glass substrate from the mask portion after making the welding mark in a state where the glass substrate is joined to the contact surface with the plastic layer,
the welding mark is located on the non-contact surface opposite to the contact surface that follows the surface of the glass substrate.