US 11,746,406 B2
Mask, preparation method and operation method thereof
Chengfa Yang, Beijing (CN); and Zhiming Lin, Beijing (CN)
Assigned to BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN); and ORDOS YUANSHENG OPTOELECTRONICS CO., LTD., Inner Mongolia (CN)
Appl. No. 16/72,359
Filed by BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN); and ORDOS YUANSHENG OPTOELECTRONICS CO., LTD., Inner Mongolia (CN)
PCT Filed Dec. 18, 2017, PCT No. PCT/CN2017/116953
§ 371(c)(1), (2) Date Jul. 24, 2018,
PCT Pub. No. WO2018/218935, PCT Pub. Date Dec. 6, 2018.
Claims priority of application No. 201710407553.2 (CN), filed on Jun. 2, 2017.
Prior Publication US 2021/0172047 A1, Jun. 10, 2021
Int. Cl. C23C 14/04 (2006.01); G03F 1/38 (2012.01); B05C 17/06 (2006.01); B05C 21/00 (2006.01); C23C 14/24 (2006.01)
CPC C23C 14/042 (2013.01) [B05C 17/06 (2013.01); B05C 21/005 (2013.01); G03F 1/38 (2013.01); C23C 14/24 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A mask, comprising:
a support and a mask strip mounted on the support, the mask strip comprising at least two connecting portions each connected with the support, and a pattern portion located between the at least two connecting portions, the pattern portion comprising a first outer surface, and each of the at least two connecting portions comprising a second outer surface;
wherein the support is provided on a side of the mask strip distal to the first outer surface, the support comprises a main body and two side portions provided on opposite sides of the main body, the main body is a square frame, the pattern portion of the mask is supported by the main body, the at least two connecting portions of the mask strip are respectively mounted on the two side portions, the main body comprises a first main surface and a second main surface opposite to each other, each of the two side portions comprises a third outer surface, and the first main surface is connected with the third outer surface,
wherein an included angle between the second outer surface and the first outer surface is greater than 180 degrees and less than 270 degrees, the third outer surface of each of the two side portions is in two-stair-step shape and comprises a first sub-surface, a second sub-surface, a third sub-surface and a fourth sub-surface which are sequentially connected, the first sub-surface is connected with the first main surface of the main body, the first sub-surface and the first main surface of the main body intersect with each other to form a first boundary, and the third sub-surface and the fourth sub-surface intersect with each other to form a second boundary; an included angle between a plane defined by the first boundary and the second boundary and the fourth sub-surface is greater than an included angle between the third sub-surface and the fourth sub-surface, and the second outer surface is fixed onto the fourth sub-surface,
wherein each of the at least two connecting portions of the mask strip is supported by both an edge where the first main surface of the main body and the third outer surface of each of the two side portions intersect with each other and an edge where the second sub-surface and the third sub-surface intersect with each other.