Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
Sivapackia Ganapathiappan, Los Altos, CA (US); Boyi Fu, San Jose, CA (US); Ashwin Chockalingam, Santa Clara, CA (US); Daniel Redfield, Morgan Hill, CA (US); Rajeev Bajaj, Fremont, CA (US); Mahendra C. Orilall, Downingtown, PA (US); Hou T. Ng, Campbell, CA (US); Jason G. Fung, Santa Clara, CA (US); and Mayu Yamamura, San Mateo, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Mar. 22, 2021, as Appl. No. 17/209,137.
Application 17/209,137 is a continuation of application No. 15/352,647, filed on Nov. 16, 2016, granted, now 10,953,515.
Application 15/352,647 is a continuation of application No. 15/296,015, filed on Oct. 17, 2016, granted, now 10,399,201, issued on Sep. 3, 2019.
Application 15/296,015 is a continuation in part of application No. 15/002,384, filed on Jan. 20, 2016, granted, now 10,875,153, issued on Dec. 29, 2020.
Application 15/002,384 is a continuation in part of application No. 14/920,801, filed on Oct. 22, 2015, granted, now 10,875,145, issued on Dec. 29, 2020.
Application 14/920,801 is a continuation in part of application No. 14/887,240, filed on Oct. 19, 2015, granted, now 10,821,573, issued on Nov. 3, 2020.
Application 14/887,240 is a continuation in part of application No. 14/885,950, filed on Oct. 16, 2015, granted, now 10,384,330, issued on Aug. 20, 2019.
Claims priority of provisional application 62/065,193, filed on Oct. 17, 2014.
Claims priority of provisional application 62/065,270, filed on Oct. 17, 2014.
Claims priority of provisional application 62/304,134, filed on Mar. 4, 2016.
Claims priority of provisional application 62/323,599, filed on Apr. 15, 2016.
Claims priority of provisional application 62/339,807, filed on May 21, 2016.
Claims priority of provisional application 62/308,334, filed on Aug. 26, 2016.
Claims priority of provisional application 62/280,537, filed on Jan. 19, 2016.
Claims priority of provisional application 62/331,234, filed on May 3, 2016.
Claims priority of provisional application 62/380,015, filed on Aug. 26, 2016.
Prior Publication US 2021/0205951 A1, Jul. 8, 2021
1. A polymer precursor composition for forming at least a portion of a polishing article, comprising:
a first precursor component comprising a cycloaliphatic epoxide;
an acrylate monomer;
a photoinitiator component which generates a photo acid when exposed to UV light; and
a viscosity thinning reactive diluent to provide the polymer precursor composition with a viscosity that enables the polymer precursor composition to be dispensed to form a portion of the polishing article by use of an additive manufacturing process.