US 11,745,288 B2
Pressure measuring device having a membrane edge and mounting element connected by a diffusion weld
Andreas Rossberg, Bad Säckingen (DE); Anh Tuan Tham, Berlin (DE); Elke Schmidt, Bad Säckingen (DE); Nils Ponath, Lörrach (DE); Jonas Conradt, Berlin (DE); Yanli Wang, Grenzach-Wyhlen (DE); and Thomas Uehlin, Schopfheim (DE)
Assigned to Endress+Hauser SE+Co. KG, Maulburg (DE)
Appl. No. 17/251,407
Filed by Endress+Hauser SE+Co. KG, Maulburg (DE)
PCT Filed May 23, 2019, PCT No. PCT/EP2019/063406
§ 371(c)(1), (2) Date Dec. 11, 2020,
PCT Pub. No. WO2019/238383, PCT Pub. Date Dec. 19, 2019.
Claims priority of application No. 10 2018 114 300.1 (DE), filed on Jun. 14, 2018.
Prior Publication US 2021/0237195 A1, Aug. 5, 2021
Int. Cl. B23K 20/02 (2006.01); B23K 20/233 (2006.01); C04B 37/02 (2006.01); G01L 9/00 (2006.01); G01L 13/02 (2006.01); G01L 19/14 (2006.01); B23K 103/18 (2006.01); B23K 101/36 (2006.01); B23K 103/00 (2006.01); B23K 103/14 (2006.01)
CPC B23K 20/026 (2013.01) [B23K 20/233 (2013.01); C04B 37/021 (2013.01); G01L 9/0075 (2013.01); G01L 13/025 (2013.01); G01L 19/147 (2013.01); B23K 2101/36 (2018.08); B23K 2103/14 (2018.08); B23K 2103/18 (2018.08); B23K 2103/52 (2018.08); C04B 2237/343 (2013.01); C04B 2237/403 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A pressure measuring device, comprising:
a pressure sensor including a ceramic measuring membrane, the measuring membrane comprising a membrane region surrounded peripherally on all sides by a membrane edge; and
a sensor mounting configured to secure the pressure sensor such that the membrane region of the measuring membrane is contactable with a medium having a pressure to be measured,
wherein the sensor mounting comprises a titanium or titanium alloy mounting element that includes an opening through which the membrane region is contactable with the medium,
wherein the membrane edge of the measuring membrane is connected directly with the mounting element by a diffusion weld, wherein the diffusion weld is produced by a diffusion welding method by which the measuring membrane becomes joined to the mounting element.