CPC B08B 9/093 (2013.01) [B08B 13/00 (2013.01); B08B 2209/08 (2013.01)] | 2 Claims |
1. A cleaning method comprising:
supplying a cleaning gas in a processing container while continuously increasing a pressure in the processing container in a stepwise manner at a plurality of time points, thereby executing a cleaning of the processing container by removing a film deposited in the processing container; and
detecting an end point of the cleaning based on time-dependent data of a concentration of a predetermined gas generated during the executing the cleaning, for each pressure of the plurality of time points,
wherein the executing the cleaning is repeated performed when the time-dependent data of the concentration of the predetermined gas generated in the continuously increasing the pressure changes from an increasing state to a decreasing state after exceeding a threshold value.
|