CPC H10N 30/302 (2023.02) [H10N 30/082 (2023.02); H10N 30/877 (2023.02)] | 18 Claims |
1. A piezoelectric device, comprising:
a base having at least one hole;
a heat conductive portion disposed in the at least one hole and in contact with a wall of the at least one hole; wherein a thermal conductivity of the heat conductive portion is greater than a thermal conductivity of the base; and
at least one piezoelectric sensor disposed on the base; wherein each piezoelectric sensor includes: a first electrode, a piezoelectric pattern made of a piezoelectric material and a second electrode that are sequentially stacked in a thickness direction of the base, wherein
the at least one hole includes a plurality of holes spaced apart from each other;
the at least one piezoelectric sensor includes a plurality of piezoelectric sensors that are arranged in an array and spaced apart from each other; and
some holes of the plurality of holes are disposed in regions, facing the plurality of piezoelectric sensors, of the base, and remaining holes of the plurality of holes are disposed in regions, between the plurality of piezoelectric sensors, of the base; and an orthographic projection of each piezoelectric sensor on the base overlaps with at least one of the plurality of holes.
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