US 11,737,199 B2
Device and method for measuring the beam angle of a light beam guided by a beam guiding optical unit
Florian Baumer, Oberkochen (DE); and Matthias Manger, Aalen-Unterkochen (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Mar. 30, 2021, as Appl. No. 17/217,295.
Application 17/217,295 is a continuation of application No. PCT/EP2019/071811, filed on Aug. 14, 2019.
Claims priority of application No. 102018124342.1 (DE), filed on Oct. 2, 2018.
Prior Publication US 2021/0219409 A1, Jul. 15, 2021
Int. Cl. H05G 2/00 (2006.01); G02B 7/28 (2021.01); G02B 27/12 (2006.01); G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC H05G 2/008 (2013.01) [G02B 7/287 (2013.01); G02B 27/126 (2013.01); G03F 7/70033 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus, comprising:
a light intensity sensor arrangement;
a focusing unit configured to focus a light beam at a specified location on the light intensity sensor arrangement; and
an adjustment unit configured to adjust a relative position of an intensity centroid of the light beam in relation to the specified location on the light intensity sensor arrangement when there is a change in a beam angle present upon entry in the apparatus,
wherein the adjustment unit is configured to keep the relative position of the intensity centroid of the light beam in relation to the specified location on the light intensity sensor arrangement constant up to a deviation corresponding to half a mean beam diameter upon incidence on the light intensity sensor arrangement.