CPC H05G 2/008 (2013.01) [G02B 7/287 (2013.01); G02B 27/126 (2013.01); G03F 7/70033 (2013.01)] | 20 Claims |
1. An apparatus, comprising:
a light intensity sensor arrangement;
a focusing unit configured to focus a light beam at a specified location on the light intensity sensor arrangement; and
an adjustment unit configured to adjust a relative position of an intensity centroid of the light beam in relation to the specified location on the light intensity sensor arrangement when there is a change in a beam angle present upon entry in the apparatus,
wherein the adjustment unit is configured to keep the relative position of the intensity centroid of the light beam in relation to the specified location on the light intensity sensor arrangement constant up to a deviation corresponding to half a mean beam diameter upon incidence on the light intensity sensor arrangement.
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