US 11,736,865 B2
Transducer, method of manufacturing transducer, and transducing device
Zhao Cui, Beijing (CN); Feng Zhang, Beijing (CN); Wenqu Liu, Beijing (CN); Liwen Dong, Beijing (CN); Zhijun Lv, Beijing (CN); Xiaoxin Song, Beijing (CN); Detian Meng, Beijing (CN); Libo Wang, Beijing (CN); and Qi Yao, Beijing (CN)
Assigned to BOE Technology Group Co., Ltd., Beijing (CN)
Appl. No. 17/288,947
Filed by BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
PCT Filed May 29, 2020, PCT No. PCT/CN2020/093391
§ 371(c)(1), (2) Date Apr. 27, 2021,
PCT Pub. No. WO2020/253501, PCT Pub. Date Dec. 24, 2020.
Claims priority of application No. 201910541885.9 (CN), filed on Jun. 21, 2019.
Prior Publication US 2021/0385583 A1, Dec. 9, 2021
Int. Cl. H04R 17/02 (2006.01); H04R 3/00 (2006.01); H04R 19/02 (2006.01); H04R 17/00 (2006.01); H04R 31/00 (2006.01); H10N 30/857 (2023.01); H10N 30/87 (2023.01)
CPC H04R 17/005 (2013.01) [H04R 3/00 (2013.01); H04R 31/006 (2013.01); H10N 30/857 (2023.02); H10N 30/872 (2023.02); H04R 2430/00 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A transducer, comprising a receiving unit and a transmitting unit,
wherein the receiving unit comprises a first receiving electrode, a first piezoelectric film, and a second receiving electrode which are sequentially stacked, and the receiving unit is configured to convert a first acoustic wave signal into an electrical signal by using a piezoelectric effect of the first piezoelectric film; and
the transmitting unit is configured to receive a control signal, which is based on the electrical signal, to transmit a second acoustic wave signal,
wherein the transmitting unit comprises a first transmitting electrode, a second piezoelectric film, and a second transmitting electrode which are sequentially stacked, and
the transmitting unit is capable of converting the control signal into the second acoustic wave signal by using a piezoelectric effect of the second piezoelectric film,
wherein the receiving unit further comprises a signal transmission circuit layer, the signal transmission circuit layer comprises a signal transmission circuit, the signal transmission circuit comprises a switching element, and the switching element comprises a control electrode, a first electrode, and a second electrode; and
the first electrode of the switching element is electrically connected to the first receiving electrode, and the switching element is configured to transmit the electrical signal according to a switching signal received by the control electrode of the switching element.
 
15. A method of manufacturing a transducer, comprising:
providing a first substrate, wherein a first peeling layer is formed on a surface of the first substrate;
forming a receiving unit on the first peeling layer, wherein the receiving unit comprises a first receiving electrode, a first piezoelectric film, and a second receiving electrode which are sequentially stacked, and a crystallization and electric field polarization processing is performed on the first piezoelectric film;
peeling off the receiving unit from the first peeling layer;
providing a second substrate, wherein a second peeling layer is formed on a surface of the second substrate;
forming a transmitting unit on the second peeling layer;
peeling off the transmitting unit from the second peeling layer; and
adhering the receiving unit, which is peeled off, and the transmitting unit, which is peeled off, to each other with an adhesive layer,
wherein forming the transmitting unit on the second peeling layer comprises:
sequentially forming a first transmitting electrode, a second piezoelectric film, and a second transmitting electrode on the second peeling layer, wherein the crystallization and electric field polarization processing is performed on the second piezoelectric film,
wherein the receiving unit further comprises a signal transmission circuit layer, the signal transmission circuit layer comprises a signal transmission circuit, the signal transmission circuit comprises a switching element, and the switching element comprises a control electrode, a first electrode, and a second electrode; and
the first electrode of the switching element is electrically connected to the first receiving electrode, and the switching element is configured to transmit an electrical signal according to a switching signal received by the control electrode of the switching element.