CPC H01L 23/5283 (2013.01) [H01L 21/02266 (2013.01); H01L 21/02271 (2013.01); H01L 21/31111 (2013.01); H01L 21/31116 (2013.01); H01L 21/32133 (2013.01); H01L 21/764 (2013.01); H01L 21/7682 (2013.01); H01L 21/7685 (2013.01); H01L 21/76804 (2013.01); H01L 21/76808 (2013.01); H01L 21/76811 (2013.01); H01L 21/76814 (2013.01); H01L 21/76816 (2013.01); H01L 21/76831 (2013.01); H01L 21/76877 (2013.01); H01L 21/76879 (2013.01); H01L 21/76897 (2013.01); H01L 23/522 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 23/5329 (2013.01); H01L 23/53209 (2013.01); H01L 23/53214 (2013.01); H01L 23/53228 (2013.01); H01L 23/53271 (2013.01); H01L 23/53295 (2013.01); H01L 21/76834 (2013.01); H01L 21/76885 (2013.01); H01L 23/53223 (2013.01); H01L 23/53238 (2013.01); H01L 23/53252 (2013.01); H01L 23/53266 (2013.01)] | 11 Claims |
1. An electrical device comprising:
a plurality of electrically conductive lines on a substrate that are positioned in an array having parallel lengths;
a plurality of air gaps between the plurality of electrically conductive lines and in a same level as the plurality of electrically conductive lines, wherein one air gap of the plurality of air gaps is present between each adjacent pair of the plurality of electrically conductive lines; and
a plurality of interconnects in electrical communication with said plurality of electrically conductive lines, wherein an exclusion zone for said plurality of interconnects is not present in said array of electrically conductive lines.
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7. An electrical device comprising:
a plurality of electrically conductive lines on a substrate that are positioned in an array having parallel lengths;
a plurality of air gaps between the plurality of electrically conductive lines and in a same level as the plurality of electrically conductive lines, wherein one air gap of the plurality of air gaps is present between each adjacent pair of the plurality of electrically conductive lines; and
a plurality of interconnects in electrical communication and self-aligned with said plurality of electrically conductive lines, wherein an exclusion zone for said plurality of interconnects is not present in said array of electrically conductive lines.
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