US 11,735,524 B2
Electrical device having conductive lines with air gaps therebetween and interconnects without exclusion zones
Benjamin D. Briggs, Waterford, NY (US); Lawrence A. Clevenger, LaGrangeville, NY (US); Christopher J. Penny, Saratoga Springs, NY (US); and Michael Rizzolo, Albany, NY (US)
Assigned to INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US)
Filed by INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US)
Filed on Sep. 19, 2019, as Appl. No. 16/576,201.
Application 16/576,201 is a division of application No. 15/479,983, filed on Apr. 5, 2017, granted, now 10,541,206.
Application 15/479,983 is a division of application No. 15/076,878, filed on Mar. 22, 2016, granted, now 9,837,355, issued on Dec. 5, 2017.
Prior Publication US 2020/0013718 A1, Jan. 9, 2020
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 23/528 (2006.01); H01L 23/522 (2006.01); H01L 23/532 (2006.01); H01L 21/764 (2006.01); H01L 21/02 (2006.01); H01L 21/3213 (2006.01); H01L 21/768 (2006.01); H01L 21/311 (2006.01)
CPC H01L 23/5283 (2013.01) [H01L 21/02266 (2013.01); H01L 21/02271 (2013.01); H01L 21/31111 (2013.01); H01L 21/31116 (2013.01); H01L 21/32133 (2013.01); H01L 21/764 (2013.01); H01L 21/7682 (2013.01); H01L 21/7685 (2013.01); H01L 21/76804 (2013.01); H01L 21/76808 (2013.01); H01L 21/76811 (2013.01); H01L 21/76814 (2013.01); H01L 21/76816 (2013.01); H01L 21/76831 (2013.01); H01L 21/76877 (2013.01); H01L 21/76879 (2013.01); H01L 21/76897 (2013.01); H01L 23/522 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 23/5329 (2013.01); H01L 23/53209 (2013.01); H01L 23/53214 (2013.01); H01L 23/53228 (2013.01); H01L 23/53271 (2013.01); H01L 23/53295 (2013.01); H01L 21/76834 (2013.01); H01L 21/76885 (2013.01); H01L 23/53223 (2013.01); H01L 23/53238 (2013.01); H01L 23/53252 (2013.01); H01L 23/53266 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An electrical device comprising:
a plurality of electrically conductive lines on a substrate that are positioned in an array having parallel lengths;
a plurality of air gaps between the plurality of electrically conductive lines and in a same level as the plurality of electrically conductive lines, wherein one air gap of the plurality of air gaps is present between each adjacent pair of the plurality of electrically conductive lines; and
a plurality of interconnects in electrical communication with said plurality of electrically conductive lines, wherein an exclusion zone for said plurality of interconnects is not present in said array of electrically conductive lines.
 
7. An electrical device comprising:
a plurality of electrically conductive lines on a substrate that are positioned in an array having parallel lengths;
a plurality of air gaps between the plurality of electrically conductive lines and in a same level as the plurality of electrically conductive lines, wherein one air gap of the plurality of air gaps is present between each adjacent pair of the plurality of electrically conductive lines; and
a plurality of interconnects in electrical communication and self-aligned with said plurality of electrically conductive lines, wherein an exclusion zone for said plurality of interconnects is not present in said array of electrically conductive lines.