CPC H01J 37/32917 (2013.01) [G01J 3/0218 (2013.01); G01J 3/443 (2013.01); H01J 37/22 (2013.01); H01J 2237/24585 (2013.01)] | 14 Claims |
1. A processing tool, comprising:
a chamber; and
an optical sensor system that passes through a wall of the chamber, wherein the optical sensor system comprises:
a housing;
an optical path through the housing, wherein the optical path comprises a first end in the chamber and a second end outside of the chamber;
a reflector at the first end of the optic al path;
a lens between the reflector and the second end of the optical path; and
an opening through the housing between the lens and the reflector, wherein the opening is within the chamber.
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