CPC G03F 9/7065 (2013.01) [G02B 6/02328 (2013.01); G02F 1/365 (2013.01); G03F 7/7015 (2013.01); G03F 7/70133 (2013.01); G03F 7/70316 (2013.01); G03F 7/70325 (2013.01); G03F 7/70575 (2013.01); G03F 7/70616 (2013.01)] | 20 Claims |
1. An apparatus for receiving input radiation and broadening a frequency range of the input radiation to provide broadband output radiation, the apparatus comprising:
a chamber;
a fiber comprising a hollow core configured to guide radiation propagating through the fiber, the hollow core in fluid communication with the chamber;
a gas generating apparatus configured to provide a gas within the chamber; and
a radical generating apparatus configured to provide free radicals within the chamber to reduce contaminants in the gas,
wherein the gas and the free radicals are within the hollow core of the fiber.
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