US 11,733,552 B2
Ultra-fast optical modulation and ultra-short pulse generation based on tunable graphene-plasmonic hybrid metasurfaces
Yu Yao, Chandler, AZ (US); and Ali Basiri, Diamond Bar, CA (US)
Assigned to ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY, Scottsdale, AZ (US)
Filed by Arizona Board of Regents on behalf of Arizona State University, Scottsdale, AZ (US)
Filed on Mar. 31, 2021, as Appl. No. 17/219,607.
Claims priority of provisional application 63/002,939, filed on Mar. 31, 2020.
Prior Publication US 2021/0302763 A1, Sep. 30, 2021
Int. Cl. G02F 1/01 (2006.01)
CPC G02F 1/0147 (2013.01) [G02F 2202/30 (2013.01); G02F 2203/10 (2013.01); G02F 2203/11 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An optical device comprising:
a silicon substrate;
a dielectric layer;
an aluminum layer between the silicon substrate and the dielectric layer; and
a metasurface nanostructure comprising:
a graphene monolayer on the dielectric layer; and
an electrically conductive nanoantenna array in direct contact with the graphene monolayer, wherein each nanoantenna in the nanoantenna array comprises multiple segments, each segment having one or more parameters selected to achieve simultaneous resonance in the mid-infrared and the near infrared spectral regions when the graphene monolayer is irradiated with a near infrared pump pulse and a continuous mid-infrared probe, wherein
the optical device generates mid-infrared pulses via ultrafast modulation of hot carriers in the graphene monolayer, and
the device achieves near field intensity enhancement of the near infrared pump pulse and the continuous mid-infrared probe exceeding 100 and 1500 fold, respectively.