US 11,733,458 B2
Edge couplers with confining features
Yusheng Bian, Ballston Lake, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GLOBALFOUNDRIES U.S. Inc., Malta, NY (US)
Filed on Oct. 4, 2021, as Appl. No. 17/493,260.
Prior Publication US 2023/0104227 A1, Apr. 6, 2023
Int. Cl. G02B 6/12 (2006.01); G02B 6/122 (2006.01); G02B 6/13 (2006.01)
CPC G02B 6/1228 (2013.01) [G02B 6/13 (2013.01); G02B 2006/12061 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A structure for an edge coupler, the structure comprising:
a first waveguide core including a first inverse taper;
a second waveguide core including a second inverse taper;
a third waveguide core including a third inverse taper laterally positioned between the first inverse taper and the second inverse taper;
a fourth waveguide core including a fourth inverse taper positioned to overlap with the first inverse taper; and
a fifth waveguide core including a fifth inverse taper positioned to overlap with the second inverse taper,
wherein the first waveguide core, the second waveguide core, and the third waveguide core comprise single-crystal silicon, and the fourth waveguide core and the fifth waveguide core comprise silicon nitride.