CPC G01S 7/4863 (2013.01) [G01S 7/4865 (2013.01); G01S 17/894 (2020.01); H01L 27/14856 (2013.01)] | 20 Claims |
1. Optical sensing apparatus, comprising:
at least one semiconductor substrate;
a first array of single-photon detectors, which are disposed on the at least one semiconductor substrate and are configured to output electrical pulses in response to photons that are incident thereon;
a second array of counters, which are disposed on the at least one semiconductor substrate and are configured to count the electrical pulses output by the single-photon detectors; and
routing and aggregation logic, which is configured, in response to a control signal, to connect the single-photon detectors to at least some of the counters such that in a first mode, each counter among the at least some of the counters aggregates and counts the electrical pulses output by a respective first group of one or more of the single-photon detectors, and in a second mode, each counter among the at least some of the counters aggregates and counts the electrical pulses output by a respective second group, different from the first group, of two or more of the single-photon detectors.
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