US 11,732,705 B2
Pumping structure, particle detector and method for pumping
Raffaele Coppeta, Eindhoven (NL); Jacopo Brivio, Eindhoven (NL); Anderson Pires Singulani, Eindhoven (NL); and Verena Vescoli, Eindhoven (NL)
Assigned to AMS AG, Premstätten (AT)
Appl. No. 16/967,828
Filed by ams AG, Premstaetten (AT)
PCT Filed Feb. 1, 2019, PCT No. PCT/EP2019/052534
§ 371(c)(1), (2) Date Aug. 6, 2020,
PCT Pub. No. WO2019/158377, PCT Pub. Date Aug. 22, 2019.
Claims priority of application No. 18157175 (EP), filed on Feb. 16, 2018.
Prior Publication US 2021/0040943 A1, Feb. 11, 2021
Int. Cl. F04B 43/02 (2006.01); F04B 43/04 (2006.01)
CPC F04B 43/026 (2013.01) [F04B 43/043 (2013.01); F04B 43/046 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A pumping structure comprising:
at least two membranes,
at least two actuation chambers, and
one evaluation chamber comprising an opening to an outside of the pumping structure,
wherein
within each actuation chamber, one lower electrode is arranged at a bottom side of the actuation chamber;
the pumping structure comprises one upper electrode which is arranged at a side of said least two membranes which faces away from said least two actuation chambers;
each of the at least two membranes is arranged between said one lower electrode and said one upper electrode in a vertical direction which is perpendicular to a pumping surface of the at least two membranes;
each of the at least two actuation chambers is directly connected to the one evaluation chamber via a channel, the channel being arranged at a side of the evaluation chamber that faces away from a side where the opening is arranged,
wherein said one upper electrode is configured to exert a force on said at least two membranes.