	US 11,732,353 B2
	Methods of protecting aerospace components against corrosion and oxidation
Sukti Chatterjee, San Jose, CA (US); Lance A. Scudder, Sunnyvale, CA (US); Yuriy Melnik, San Jose, CA (US); David A. Britz, San Jose, CA (US); Thomas Knisley, Livonia, MI (US); Kenichi Ohno, Sunnyvale, CA (US); and Pravin K. Narwankar, Sunnyvale, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 16, 2020, as Appl. No. 16/850,856.
Claims priority of provisional application 62/839,186, filed on Apr. 26, 2019.
Prior Publication US 2020/0340107 A1, Oct. 29, 2020
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 16/40 (2006.01); C23C 16/455 (2006.01); C23C 28/02 (2006.01); C23C 16/56 (2006.01); B64F 5/40 (2017.01)

CPC C23C 16/403 (2013.01) [C23C 16/405 (2013.01); C23C 16/45525 (2013.01); C23C 16/56 (2013.01); C23C 28/02 (2013.01); B64F 5/40 (2017.01)]

12 Claims

1. A method for depositing a coating on an aerospace component, comprising:

depositing a first deposited layer on a surface of an aerospace component by a chemical vapor deposition (CVD) process, the aerospace component comprising nickel and aluminum;

converting the first deposited layer to a crystalline phase; and

forming an aluminum oxide region between the first deposited layer and the aerospace component, the aluminum oxide region having a crystalline assembly,

wherein the first deposited layer and the aluminum oxide region form a protective coating directly on the aerospace component, the protective coating formed conformally and following a surface topology of the aerospace component; and

wherein the protective coating protects the aerospace component from corrosion and oxidation and decreases a rate of depletion of aluminum from the aerospace component.