US 11,732,347 B2
Standard mask apparatus and method of manufacturing standard mask apparatus
Hideyuki Okamoto, Tokyo (JP); Chikao Ikenaga, Tokyo (JP); Yoshihiro Baba, Tokyo (JP); and Daigo Aoki, Tokyo (JP)
Assigned to Dai Nippon Printing Co., Ltd., Tokyo (JP)
Filed by Dai Nippon Printing Co., Ltd., Tokyo (JP)
Filed on Mar. 8, 2021, as Appl. No. 17/194,708.
Claims priority of application No. 2020-044575 (JP), filed on Mar. 13, 2020; application No. 2020-046804 (JP), filed on Mar. 17, 2020; and application No. 2020-077608 (JP), filed on Apr. 24, 2020.
Prior Publication US 2021/0348265 A1, Nov. 11, 2021
Int. Cl. C23C 14/52 (2006.01); C23C 14/04 (2006.01); H10K 71/00 (2023.01)
CPC C23C 14/52 (2013.01) [C23C 14/042 (2013.01); H10K 71/00 (2023.02); Y10T 29/49826 (2015.01); Y10T 29/49863 (2015.01)] 8 Claims
OG exemplary drawing
 
1. A method of manufacturing a standard mask apparatus for evaluating a vapor deposition chamber of a manufacturing apparatus for an organic device, the manufacturing method comprising:
a fixing step of fixing at least one standard mask to a frame, wherein
the frame includes a pair of first sides extending in a first direction, a pair of second sides extending in a second direction that intersects with the first direction, and an opening,
the at least one standard mask includes a pair of end portions in the first direction, and at least one through-hole located between the pair of end portions, and
the fixing step includes
a placement step of placing the at least one standard mask such that the pair of end portions overlaps the pair of second sides,
a mask alignment step of, after the placement step, while a joint tension is being applied to the at least one standard mask in the first direction and the at least one standard mask is being pressed against the frame, adjusting a position of the at least one standard mask with respect to the frame, and
a joining step of, after the mask alignment step, while a joint tension is being applied to the at least one standard mask in the first direction and the at least one standard mask is being pressed against the frame, joining the at least one standard mask with the frame,
wherein, in the mask alignment step, the at least one standard mask is moved with respect to the frame while being pressed against the frame.