CPC B24B 53/017 (2013.01) [B24B 37/005 (2013.01); B24B 37/10 (2013.01); F16C 32/044 (2013.01)] | 12 Claims |
1. A substrate rotation device comprising:
an outer cylinder;
an inner cylinder positioned inside the outer cylinder;
a motor for rotating the inner cylinder;
a magnetic bearing for magnetically levitating the inner cylinder; and
a substrate holder disposed on the inner cylinder,
wherein the motor is a radial motor and includes:
a motor stator mounted on the outer cylinder, and
a motor rotor mounted on the inner cylinder,
the magnetic bearing is a radial magnetic bearing and includes:
a magnetic bearing stator mounted on the outer cylinder, and
a magnetic bearing rotor mounted on the inner cylinder, and
the magnetic bearing is configured to magnetically levitate the inner cylinder with an attractive force between the magnetic bearing stator and the magnetic bearing rotor.
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