CPC H03H 3/02 (2013.01) [H03B 5/04 (2013.01); H03B 5/32 (2013.01)] | 13 Claims |
1. A resonator device comprising:
a base including a semiconductor substrate having a first surface and a second surface in a front-back relationship with each other;
a resonator element disposed at the first surface side; and
a lid to be bonded to the first surface of the base, the lid and the base forming a cavity for accommodating the resonator element, wherein
an integrated circuit is disposed at the semiconductor substrate, the integrated circuit including:
an oscillation circuit electrically coupled to the resonator element;
a memory circuit configured to store a reference value of an output characteristic of the resonator element; and
a determination circuit configured to compare a detection value of the output characteristic of the resonator element with the reference value and determine an airtight state inside the cavity based on a comparison result.
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