CPC H01L 21/02164 (2013.01) [H01L 21/0228 (2013.01)] | 20 Claims |
1. A method of forming an oxide film including two non-oxygen elements, the method comprising:
providing an electron donor compound on a substrate;
providing a first source material on the substrate, the first source material comprising a first central element; and
providing an oxidant on the substrate to form an oxide film,
wherein the electron donor includes an unshared electron pair or includes a double bond or a triple bond.
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