US 11,728,143 B2
Process kit with adjustable tuning ring for edge uniformity control
Yogananda Sarode Vishwanath, Bangalore (IN)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 25, 2020, as Appl. No. 17/33,177.
Application 17/033,177 is a continuation of application No. 16/131,909, filed on Sep. 14, 2018, granted, now 10,790,123.
Claims priority of application No. 201841019829 (IN), filed on May 28, 2018.
Prior Publication US 2021/0013014 A1, Jan. 14, 2021
Int. Cl. H01L 21/687 (2006.01); H01L 21/683 (2006.01); H01J 37/32 (2006.01); H01L 21/3065 (2006.01)
CPC H01J 37/32642 (2013.01) [H01J 37/321 (2013.01); H01J 37/32091 (2013.01); H01J 37/32522 (2013.01); H01J 37/32724 (2013.01); H01L 21/3065 (2013.01); H01L 21/6833 (2013.01); H01L 21/68735 (2013.01); H01L 21/68742 (2013.01); H01L 21/68764 (2013.01); H01L 21/68785 (2013.01); H01J 37/32513 (2013.01); H01J 2237/002 (2013.01); H01J 2237/2001 (2013.01); H01J 2237/334 (2013.01); H01J 2237/3343 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A process kit for a substrate processing chamber, comprising:
an edge ring having a first ring component and a second ring component, the first ring component interfaced with the second ring component such that the second ring component is movable relative to the first ring component forming a gap therebetween, and the second ring component having an upper surface and a lower surface;
a sliding ring positioned beneath the second ring component, the sliding ring having an upper surface and a lower surface, and the upper surface of the sliding ring contacting the lower surface of the second ring component;
an adjustable tuning ring positioned beneath the sliding ring, the adjustable tuning ring having an upper surface and a lower surface, and the upper surface of the adjustable tuning ring contacting the lower surface of the sliding ring;
a cover ring at least partially adjacent to the second ring component, and wherein the cover ring is completely positioned radially outward of the adjustable tuning ring;
a sleeve at least partially positioned beneath the cover ring and at least partially positioned radially outward of the sliding ring and the adjustable tuning ring; and
an actuating mechanism interfaced with the lower surface of the adjustable tuning ring, the actuating mechanism configured to actuate the adjustable tuning ring such that the gap between the first ring component and the second ring component is varied.