US 11,728,140 B1
Hydraulic feed system for an ion source
Neil J. Bassom, Hamilton, MA (US); Joshua Abeshaus, Haverhill, MA (US); David Sporleder, Billerica, MA (US); Neil Colvin, Merrimack, NH (US); Joseph Valinski, Newmarket, NH (US); Michael Cristoforo, Beverly, MA (US); Vladimir Romanov, Danville, NH (US); and Pradeepa Kowrikan Subrahmnya, Thirthahalli (IN)
Assigned to Axcelis Technologies, Inc., Beverly, MA (US)
Filed by Axcelis Technologies, Inc., Beverly, MA (US)
Filed on Jan. 31, 2022, as Appl. No. 17/588,999.
Int. Cl. H01J 37/26 (2006.01); H01J 37/32 (2006.01); H01J 37/08 (2006.01)
CPC H01J 37/32412 (2013.01) [H01J 37/08 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An ion source for an ion implantation system, the ion source comprising:
an arc chamber defining an arc chamber volume;
a reservoir operably coupled to the arc chamber and defining a reservoir volume, wherein the reservoir volume is configured to contain a liquid therein;
a conduit fluidly coupling the reservoir volume to the arc chamber volume, wherein the conduit has a first opening and a second opening, wherein the first opening is operably coupled to the reservoir, and wherein the second opening is elevated from the first opening and open to the arc chamber volume; and
a liquid control apparatus operably coupled to the reservoir, wherein the liquid control apparatus is configured to control a first volume of the liquid defined within the reservoir volume, and wherein the first volume of the liquid within the reservoir volume further defines a predetermined supply of the liquid to the arc chamber volume.