US 11,727,973 B2
Magnetic property measuring systems, methods for measuring magnetic properties, and methods for manufacturing magnetic memory devices using the same
Eunsun Noh, Yongin-si (KR); Juhyun Kim, Yongin-si (KR); and Ung Hwan Pi, Hwaseong-si (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on May 11, 2021, as Appl. No. 17/316,973.
Application 17/316,973 is a division of application No. 15/933,659, filed on Mar. 23, 2018, granted, now 11,037,611.
Prior Publication US 2021/0264957 A1, Aug. 26, 2021
Int. Cl. G11C 11/16 (2006.01); G01R 33/09 (2006.01); H10N 50/01 (2023.01); H10N 50/85 (2023.01)
CPC G11C 11/161 (2013.01) [G01R 33/093 (2013.01); H10N 50/01 (2023.02); H10N 50/85 (2023.02)] 6 Claims
OG exemplary drawing
 
1. A magnetic property measuring system, comprising:
a plurality of coil structures configured to apply a magnetic field to a sample, the sample including a substrate, a wiring structure on the substrate, and a plurality apart from each other, the magnetic field perpendicular to a surface of the sample, each coil structure of the plurality of coil structures including
a pole piece, and
a coil surrounding an outer circumferential surface of the pole piece;
a light source configured to irradiate incident light to the sample, wherein the incident light has a wavelength equal to or less than about 580 nm; and
a detector configured to detect a polarization of light reflected from the sample based on the incident light irradiated to the sample,
wherein the magnetic property measuring system is configured to determine one or more perpendicular magnetic properties of the plurality of magnetic tunnel junction patterns based on analyzing the detected polarization of the reflected light.