US 11,726,403 B2
Information processing apparatus, information processing method, and computer program
Toshiyuki Sato, Utsunomiya (JP); and Sentaro Aihara, Utsunomiya (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Oct. 2, 2020, as Appl. No. 17/61,923.
Claims priority of application No. 2019-187550 (JP), filed on Oct. 11, 2019.
Prior Publication US 2021/0109441 A1, Apr. 15, 2021
Int. Cl. G03F 7/00 (2006.01); G06T 7/00 (2017.01)
CPC G03F 7/0002 (2013.01) [G06T 7/001 (2013.01); G06T 2207/30141 (2013.01); G06T 2207/30148 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An information processing system comprising:
an imprint apparatus configured to:
supply imprint material on a substrate via a dispenser; and
bringing a mold into contact with the imprint material supplied to the substrate to form a pattern on the imprint material; and
an information processing apparatus including:
at least one processor or circuit which functions as:
an obtaining unit configured to obtain inspection information regarding a result of an inspection of the substrate which has been subjected to the imprint process;
an analysis unit configured to analyze the inspection information and obtain analysis information associated with the result of the imprint process; and
a display control unit configured to display at least any of the inspection information and the analysis information on a screen of a display apparatus at the same time with the coating information.