CPC G03F 1/22 (2013.01) [G03F 7/2004 (2013.01); H01L 21/0274 (2013.01); H01L 22/12 (2013.01); G01N 2021/95676 (2013.01)] | 10 Claims |
1. A method for manufacturing a reticle, the method comprising:
forming a reflective layer on a reticle substrate; and
inspecting the reflective layer,
the inspecting of the reflective layer including,
cooling the reticle substrate,
irradiating a laser beam to the reflective layer, and
receiving the laser beam using a photodetector to obtain an image of the reflective layer; and
detecting whether a defect in the reflective layer exists based on the image of the reflective layer;
wherein the reticle substrate is cooled to below 145 kelvins (K) to decrease a specific heat capacity of the reflective layer and to increase a power of the laser beam.
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