CPC G02B 27/30 (2013.01) [H01L 27/14625 (2013.01); H01L 31/02325 (2013.01)] | 20 Claims |
1. An optical collimator, comprising:
a dielectric layer;
a substrate; and
a plurality of via holes,
wherein the dielectric layer is formed over the substrate, wherein the plurality of via holes are configured as an array along a lateral direction of a first surface of the dielectric layer, wherein each of the plurality of via holes extends through the dielectric layer and the substrate from the first surface of the dielectric layer to a second surface of the substrate in a vertical direction, wherein a bulk impurity doping concentration and a first thickness of the substrate are configured so as to allow the optical collimator to filter light in a range of wavelengths between 780 and 1100 nanometers.
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