US 11,726,236 B2
Graded pore structure without phase mask
Shailesh N. Joshi, Ann Arbor, MI (US); Gaurav Singhal, Champaign, IL (US); Paul Vannest Braun, Champaign, IL (US); Danny J. Lohan, Ann Arbor, MI (US); and Kai-Wei Lan, Champaign, IL (US)
Assigned to Toyota Motor Engineering & Manufacturing North America, Inc., Plano, TX (US); and The Board of Trustees of The University of Illinois, Urbana, IL (US)
Filed by Toyota Motor Engineering & Manufacturing North America, Inc., Plano, TX (US)
Filed on Aug. 5, 2021, as Appl. No. 17/395,029.
Prior Publication US 2023/0044343 A1, Feb. 9, 2023
Int. Cl. G02B 1/00 (2006.01); G02B 6/12 (2006.01); G02B 6/122 (2006.01); B82Y 20/00 (2011.01); G02B 6/136 (2006.01)
CPC G02B 1/005 (2013.01) [G02B 6/12002 (2013.01); G02B 6/1225 (2013.01); G02B 6/136 (2013.01); B82Y 20/00 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A three-dimensional photonic crystal template comprising:
a periodic patterned cured photoresist composition on an electrically conductive reflective substrate, wherein a gradient of a constructive volume of the periodic patterned cured photoresist composition varies from an air interface to the electrically conductive reflective substrate such that the three-dimensional photonic crystal template has a porosity gradient.