CPC G02B 1/002 (2013.01) [G01N 21/8422 (2013.01); B82Y 20/00 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); G01N 2021/8427 (2013.01)] | 13 Claims |
1. A method of making a metamaterial device comprising:
forming a spacer over a base, wherein the base comprises at least one of ZrN, HfN, or TiN;
forming a plasmonic nanostructure over the spacer, wherein the plasmonic nanostructure comprises at least one of ZrN, HfN, or TiN;
wherein a thickness of the spacer is configured to be less than a wavelength of an incident light; and
wherein a thickness of the base is configured to be larger than the equivalent of a skin depth of the incident light in the base.
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