US 11,726,149 B2
Magnetic sensor and inspection device
Akira Kikitsu, Yokohama Kanagawa (JP); Satoshi Shirotori, Yokohama Kanagawa (JP); Yoshihiro Higashi, Komatsu Ishikawa (JP); Yoshinari Kurosaki, Kawasaki Kanagawa (JP); and Hitoshi Iwasaki, Nerima Tokyo (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Aug. 18, 2021, as Appl. No. 17/405,920.
Claims priority of application No. 2021-003368 (JP), filed on Jan. 13, 2021.
Prior Publication US 2022/0221536 A1, Jul. 14, 2022
Int. Cl. G01R 33/09 (2006.01); G01R 33/00 (2006.01)
CPC G01R 33/093 (2013.01) [G01R 33/0011 (2013.01); G01R 33/0023 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A magnetic sensor, comprising:
a base body including a base body end portion;
a magnetic member, a direction from the base body toward the magnetic member being along a first direction; and
an element part,
the element part including a first magnetic element and a second magnetic element,
an orientation from the first magnetic element toward the second magnetic element being along a second direction crossing the first direction,
a portion of the first magnetic element and a portion of the second magnetic element being between the base body and the magnetic member in the first direction,
a position in a third direction of an other portion of the first magnetic element and a position in the third direction of an other portion of the second magnetic element being between a position in the third direction of the base body end portion and a position in the third direction of the magnetic member,
the third direction crossing a plane including the first and second directions.