CPC G01R 31/2863 (2013.01) [G01R 31/2874 (2013.01)] | 15 Claims |
1. A thermal conditioning device for conditioning a plurality of electronic devices under test thermally,
wherein
the thermal conditioning device comprises:
a plurality of extensible elements with variable length each for conditioning a corresponding one of the electronic devices thermally in an individual manner,
a process circulation system for circulating a process heat-conductive fluid in the extensible elements
a process heat exchange system for exchanging heat with the process heat-conductive fluid, and
a pressure regulation system for regulating a pressure of the process heat-conducting fluid to move the extensible elements between a shortened condition and a lengthened condition, each of the extensible elements in the lengthened condition being pressed against the corresponding electronic device.
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