CPC G01N 21/9501 (2013.01) [G01B 11/254 (2013.01); G01B 2210/56 (2013.01)] | 15 Claims |
1. A multi-scale spectral imaging apparatus comprising:
a light source configured to generate and output light;
a stage having a measurement target thereon;
a line-scan spectral imaging (SI) optical system configured to:
measure the measurement target using a first scale;
slopingly irradiate the light from the light source onto the measurement target in a line beam shape;
divide light reflected by the measurement target into divided light; and
perform imaging of the divided light; and
an angle-resolved SI optical system configured to:
measure the measurement target using a second scale that is smaller than the first scale;
divide the light from the light source into monochromatic light;
slopingly irradiate the monochromatic light onto the measurement target by using a reflective objective lens; and
perform imaging of light reflected by the measurement target.
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