CPC G01L 1/142 (2013.01) [G06F 3/0445 (2019.05); G06F 2203/04102 (2013.01)] | 20 Claims |
1. A sensor, comprising:
a capacitive sensor electrode layer;
a first reference electrode layer; and
an elastic layer provided between the capacitive sensor electrode layer and the first reference electrode layer, wherein the elastic layer includes a conductive material with a density distribution that decreases from the first reference electrode layer towards the capacitive sensor electrode layer,
a thickness of the elastic layer is 100 μm or less, and
a weight per unit area of the elastic layer is less than 3 mg/cm2.
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