CPC G01C 19/5712 (2013.01) [G01P 1/00 (2013.01); G01P 15/125 (2013.01)] | 17 Claims |
1. A sensing device comprising:
a resonant member that is movable in a first mode and a second mode; and
an electrode,
wherein the resonant member has a capacitive surface portion that faces and is capacitively coupled to a capacitive surface portion of the electrode,
wherein displacement for each point along the capacitive surface portion of the resonant member in the first mode is substantially tangent to the point.
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