US 11,724,353 B2
Chamber components with polished internal apertures
Jennifer Y. Sun, Mountain View, CA (US); Vahid Firouzdor, San Mateo, CA (US); David Koonce, Santa Clara, CA (US); and Biraja Prasad Kanungo, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 7, 2022, as Appl. No. 17/834,207.
Application 17/834,207 is a division of application No. 16/216,796, filed on Dec. 11, 2018, granted, now 11,370,078.
Application 15/619,024 is a division of application No. 14/318,518, filed on Jun. 27, 2014, granted, now 9,687,953, issued on Jun. 27, 2017.
Application 16/216,796 is a continuation of application No. 15/619,024, filed on Jun. 9, 2017, granted, now 10,189,141, issued on Jan. 29, 2019.
Prior Publication US 2022/0297256 A1, Sep. 22, 2022
Int. Cl. B24B 31/00 (2006.01); B24B 31/116 (2006.01); B24B 57/04 (2006.01); B24B 5/40 (2006.01); B23B 35/00 (2006.01); B24B 33/02 (2006.01)
CPC B24B 31/006 (2013.01) [B23B 35/00 (2013.01); B24B 5/40 (2013.01); B24B 31/003 (2013.01); B24B 31/116 (2013.01); B24B 33/02 (2013.01); B24B 57/04 (2013.01); B23B 2220/445 (2013.01); B23B 2226/18 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method of manufacturing a plasma-resistant chamber component of a processing chamber, the method comprising: polishing at least one aperture of the plasma-resistant chamber component, the component disposed inside a ring between a mounting stage and a clamp, wherein a pump configured to flow an abrasive media is fluidly coupled to the plasma-resistant chamber component by the mounting stage, polishing the at least one aperture of the plasma-resistant chamber component by flowing the abrasive media along a first abrasive media flow path from the mounting stage to the clamp through the at least one aperture of the plasma-resistant chamber component and along a second abrasive media flow path between an outer surface of the plasma-resistant chamber component and an inner surface of the ring, and wherein the abrasive media comprises a polymer base and a plurality of abrasive particles.