US 11,724,236 B2
System and method for fluid preparation
Chang-Hyeon Nam, Singapore (SG); Hong-Sik Shin, Singapore (SG); and Injoon Yeo, Singapore (SG)
Assigned to XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD., Qingdao (CN)
Filed by XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD., Qingdao (CN)
Filed on Oct. 30, 2019, as Appl. No. 16/668,416.
Claims priority of provisional application 62/782,386, filed on Dec. 20, 2018.
Prior Publication US 2020/0197882 A1, Jun. 25, 2020
Int. Cl. B01F 3/08 (2006.01); B01F 15/00 (2006.01); B01F 15/04 (2006.01); B01F 23/40 (2022.01); B01F 35/83 (2022.01); B01F 35/21 (2022.01); H01L 21/02 (2006.01)
CPC B01F 23/49 (2022.01) [B01F 35/2111 (2022.01); B01F 35/83 (2022.01); H01L 21/02041 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A fluid preparation system, comprising:
a first tank containing a first chemical solution;
a second tank containing a second chemical solution;
a chemical supply line coupled to the first tank and configured to supply the first chemical solution;
a mixer coupled to the first tank and the second tank, the mixer comprising a first piston, a first spring, a first internal inlet, a second piston, a second spring, and a second internal inlet, the first piston being coupled to the first internal inlet and the first spring, the second piston being coupled to the second internal inlet and the second spring; and
a deionized (DI) water supply line coupled to the mixer and configured to supply DI water,
wherein the first chemical solution and the DI water are mixed by flowing clockwise and counterclockwise alternatingly in a plurality of rotation circulators of the mixer to generate the second chemical solution, and the second chemical solution is supplied from the mixer to the second tank.