CPC H01J 37/3177 (2013.01) [B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); H01J 37/3045 (2013.01); H01J 2237/2443 (2013.01); H01J 2237/2446 (2013.01); H01J 2237/30433 (2013.01); H01J 2237/31757 (2013.01)] | 20 Claims |
[ 38. A multi-beam charged particle system comprising a multi beam charged particle tool configured to generate multiple charged particle beams, the system comprising:
a sensor configured to detect the charged particle beams, the sensor comprising:
a structure comprising a plurality of patterns that are equally oriented and periodically arranged, wherein one or more patterns of the plurality of patterns are assigned per beam among the multiple charged particle beams,
wherein the structure is configured to selectively block the charged particle beams partially or entirely.]
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