US 11,723,293 B2
Reactivation of a deposited metal liner
Robert L. Bruce, White Plains, NY (US); Cheng-Wei Cheng, White Plains, NY (US); and Matthew Joseph BrightSky, Armonk, NY (US)
Assigned to International Business Machines Corporation, Armonk, NY (US)
Filed by International Business Machines Corporation, Armonk, NY (US)
Filed on Mar. 26, 2021, as Appl. No. 17/213,283.
Prior Publication US 2022/0310912 A1, Sep. 29, 2022
Int. Cl. H01L 45/00 (2006.01); H10N 70/00 (2023.01); H10N 70/20 (2023.01)
CPC H10N 70/8413 (2023.02) [H10N 70/011 (2023.02); H10N 70/231 (2023.02); H10N 70/826 (2023.02)] 16 Claims
OG exemplary drawing
 
1. A phase change memory device comprising:
a heater element on a bottom electrode surrounded by a dielectric material;
a metal nitride liner over the heater element, wherein the metal nitride liner is oxide-free with a top surface that is level with a top surface of the dielectric material;
a phase change material over the metal nitride liner and the dielectric material; and
a top electrode over the phase change material.