US 11,723,256 B2
Method and apparatus for manufacturing display device
Yeonju Kang, Yongin-si (KR); and Sanghoon Kim, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Sep. 2, 2020, as Appl. No. 17/10,590.
Claims priority of application No. 10-2020-0001576 (KR), filed on Jan. 6, 2020.
Prior Publication US 2021/0210735 A1, Jul. 8, 2021
Int. Cl. C23C 14/04 (2006.01); H10K 71/00 (2023.01); C23C 14/24 (2006.01); H10K 71/16 (2023.01)
CPC H10K 71/00 (2023.02) [C23C 14/042 (2013.01); C23C 14/24 (2013.01); H10K 71/164 (2023.02); H10K 71/166 (2023.02)] 14 Claims
OG exemplary drawing
 
1. An apparatus for manufacturing a display device, the apparatus comprising a mask assembly, the mask assembly comprising:
a mask frame comprising an opening;
a plurality of first supports spaced apart from each other on the mask frame and each comprising a first center portion crossing the opening in a first direction and a first protrusion protruding from the first center portion in a second direction crossing the first direction;
a plurality of second supports spaced apart from each other on the mask frame and each comprising a second center portion crossing the opening in a third direction crossing the first direction and a second protrusion protruding from the second center portion in a fourth direction crossing the third direction; and
a mask sheet comprising a plurality of pattern holes and arranged over the mask frame to be supported by the plurality of first supports and the plurality of second supports,
wherein the plurality of first supports adjacent to each other and the plurality of second supports adjacent to each other shield a portion of the plurality of pattern holes to define a deposition region.